多晶硅尾气吸附塔再生气回收工艺的节能优化及流程模拟
沈琛
Energy-saving optimization and process simulation for regenerated-gas recovery process in tail gas recovery tower of polysilicon production
SHEN Chen
现代化工
.
2019, (S1): 192
-194
.
DOI: 10.16606/j.cnki.issn0253-4320.2019.S.044
