多晶硅产品中碳质量分数的影响因素及控制措施
曹玲玲, 蔡延国, 宗冰, 魏东亮, 吴巧芸, 曹岩德, 安军林, 马婷, 王体虎
Influencing factors and control measures of carbon content in polysilicon products
CAO Ling-ling, CAI Yan-guo, ZONG Bing, WEI Dong-liang, WU Qiao-yun, CAO Yan-de, AN Jun-lin, MA Ting, WANG Ti-hu
现代化工
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2019, (7): 183
-184,186
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DOI: 10.16606/j.cnki.issn0253-4320.2019.07.038
