金属烧结滤芯用于多晶硅氯硅烷净化放大研究
刘见华, 万烨, 赵雄, 赵宇, 周勇毅, 严大洲
Pilot study on metal sintered filter element for purifying chlorosilane in polysilicon production
LIU Jian-hua, WAN Ye, ZHAO Xiong, ZHAO Yu, ZHOU Yong-yi, YAN Da-zhou
现代化工
.
2021, (7): 231
-233
.
DOI: 10.16606/j.cnki.issn0253-4320.2021.07.047
