Abstract: Metal powder sintered filter element is utilized to perform pilot study on purification of chlorosilane in dry recovery section of polysilicon production.Under the same filtration precision and area,the influence of treatment amount on initial filter pressure drop is compared with the influence of different stripping method for filter cake on the stripping rate.Results show that outlet dust concentration is 2.1 g·m-3 and filtration efficiency is 99.1% when the entrance dust concentration is 235 g·m-3 and liquid phase back wash filter cake stripping method is employed.
刘见华, 万烨, 赵雄, 赵宇, 周勇毅, 严大洲. 金属烧结滤芯用于多晶硅氯硅烷净化放大研究[J]. 现代化工, 2021, 41(7): 231-233.
LIU Jian-hua, WAN Ye, ZHAO Xiong, ZHAO Yu, ZHOU Yong-yi, YAN Da-zhou. Pilot study on metal sintered filter element for purifying chlorosilane in polysilicon production. Modern Chemical Industry, 2021, 41(7): 231-233.