采用金属粉末烧结滤芯对多晶硅制备干法回收工序的氯硅烷进行中试净化研究，在相同过滤精度和面积下，对比处理量对初始过滤压降和不同滤饼剥离方式对剥离率的影响。结果表明，当原料颗粒浓度为235 g/m³、采用液相反冲滤饼剥离方式时，出口颗粒平均浓度为2.1 g/m³，过滤效率为99.1%。

Metal powder sintered filter element is utilized to perform pilot study on purification of chlorosilane in dry recovery section of polysilicon production.Under the same filtration precision and area,the influence of treatment amount on initial filter pressure drop is compared with the influence of different stripping method for filter cake on the stripping rate.Results show that outlet dust concentration is 2.1 g·m^-3 and filtration efficiency is 99.1% when the entrance dust concentration is 235 g·m^-3 and liquid phase back wash filter cake stripping method is employed.