介绍了多晶硅还原尾气回收装置吸附塔再生气回收工艺。通过Aspen Plus流程模拟软件对再生气回收现有工艺和节能优化工艺进行了模拟计算，并对两种工艺的公用工程消耗及设备投资进行了比较和分析。结果表明，再生气回收节能优化工艺与现有工艺相比，电耗、循环水消耗和氟利昂用量均有较大幅度的降低，氟利昂冷媒的品级也从-40℃降至-10℃，同时节省了设备投资，在运行成本和投资方面具有明显的优势。

The regenerated gas recovery process of the adsorption tower in the off-gas recovery unit of polysilicon plant are briefly reviewed.Both the existed process and the energy-saving optimization process are simulated by means of Aspen Plus software.The utilities consumption and investment of two processes are compared and analyzed.The result shows that the consumption amounts of power,circulating water and freon refrigerant by the energy-saving optimization process can be reduced to a large degree.The grade of freon refrigerant also decreases from -40℃ to -10℃.The equipment investment is saved concurrently.It concludes that the energy saving optimization process has obvious advantages in operation cost and investment compared with the existed process.