Abstract: High resistance to synergistic corrosion of HCl and moisture as well as negligible emission of secondary impurities are essential properties for a qualified adsorbent to dehydrate deeply HCl electronic gas,considering the fact that HCl is highly hydrophilic,and could be triggered to be strongly corrosive and reactive.Herein a number of commercial aluminosilicate molecular sieves are investigated regarding their corrosion resistance,impurity release and deep dehydration performance for real HCl electronic gas.Results indicate that both corrosion-resistance and dehydrating performance of aluminosilicate molecular sieves are closely tied to their silica to alumina (SiO2/Al2O3) ratios.A ratio of 2 results in poor corrosion resistance whilst those of 16-360 enable excellent corrosion-resistance.Molecular sieves with 2-300 of SiO2/Al2O3 ratio can reduce around 2 μL·L-1 of moisture in HCl electronic gas down to 130-200 nL·L-1 level.Both the dehydrating efficiency and speed exhibits a downward trend along with the increase of SiO2/Al2O3 ratio.Accordingly,MS-1 molecular sieve and its modified version have been developed which are capable of removing the moisture in HCl electronic gas down to around 160 and less than 100 nL·L-1,respectively,without significant contribution to metal impurities in HCl.
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