Abstract: This paper summaries and analyzes the overall supply and demand situation of materials for integrated circuit in China and in the world from two aspects such as silicon chip and process chemicals.Among process chemicals,four fields including ultra-clean high-purity specialty gases,photoresistor,wet electronic chemicals and CMP materials are reviewed from aspects of global main manufacturers,China's existing makers and new projects and market consumption situation.The future market development trends are predicted,and measurements and suggestions for China to develop chemicals and materials for integrated circuit are also given.
王海霞, 冯应国, 仲伟科. 中国集成电路用化学品发展现状[J]. 现代化工, 2018, 38(11): 1-7.
WANG Hai-xia, FENG Ying-guo, ZHONG Wei-ke. China's development status of chemicals for integrated circuit. Modern Chemical Industry, 2018, 38(11): 1-7.