Research progress in reduction process of polysilicon production by modified Siemens method
LI Ya-guang1,2, NIE Zhi-feng1, ZHOU Yang-min2,3, FANG Wen-bao1, XIE Gang3, HOU Yan-qing1
1. State Key Laboratory for Clean Utilization of Complex Nonferrous Metal Resources, Kunming University of Science and Technology, Kunming 650093, China; 2. Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming 650093, China; 3. Kunming Metallurgical Research Institute, Kunming 650093, China
Abstract: The main polysilicon production methods are compared each other.The advantages and disadvantages of the modified Siemens method,the fluidized bed method and the metallurgical method are pointed out.The research progress and existing problems for the process of the modified Siemens method that is the mainstream polysilicon production method at present are introduced emphatically,mainly from the aspects of reaction mechanism,numerical simulation and process flow,etc.
李亚广, 聂陟枫, 周扬民, 方文宝, 谢刚, 侯彦青. 改良西门子法制备多晶硅还原过程研究进展[J]. 现代化工, 2018, 38(5): 38-42.
LI Ya-guang, NIE Zhi-feng, ZHOU Yang-min, FANG Wen-bao, XIE Gang, HOU Yan-qing. Research progress in reduction process of polysilicon production by modified Siemens method. Modern Chemical Industry, 2018, 38(5): 38-42.
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