综述了多晶硅生产从还原系统到原料系统几种常见的热量转换工艺，包括导热油热量回收利用系统、高温水热量回收利用系统、高温水回收闪蒸低压蒸汽系统。介绍了热量转化工艺流程及其生产中的一些关键参数，并对比了每种工艺的优缺点。

Based on decades of development in China's polysilicon industry,several common heat recycling systems,which are used from CVD stage to feedstocks purification stage in polysilicon production,are introduced,including heat-conducting oil heat recycling system,high temperature water heat recycling system and high temperature water recycling flash low pressure steam system.The introduction is focused on the heat recycling process and some key parameters in the actual production.Finally,these systems are compared with each other from aspects such as media cost,equipment investment,environmental protection cost and heat utilization.