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摘要
从硅片、制程化学品两个大方面综合分析了国内外集成电路用材料的总体供求状况。在制程化学品方面，按超净高纯特种气体、光刻胶、湿电子化学品、CMP抛光材料四大部分，介绍了国际主要生产商、国内生产商及新建项目、市场消费情况，并对未来市场发展进行了预测。
Abstract
This paper summaries and analyzes the overall supply and demand situation of materials for integrated circuit in China and in the world from two aspects such as silicon chip and process chemicals.Among process chemicals,four fields including ultra-clean high-purity specialty gases,photoresistor,wet electronic chemicals and CMP materials are reviewed from aspects of global main manufacturers,China's existing makers and new projects and market consumption situation.The future market development trends are predicted,and measurements and suggestions for China to develop chemicals and materials for integrated circuit are also given.
关键词
集成电路
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硅片
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化学机械抛光
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超净高纯试剂
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特种气体
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光刻胶
Key words
integrated circuit
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silicon chip
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chemical mechanical polishing
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ultra-clean and high-purity reagents
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specialty gases
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photoresistor
Author summay
王海霞(1981-),女,博士,工程师,研究方向为石化化工市场,010-64697940,hjwanghx@163.com
中国集成电路用化学品发展现状[J].
, 2018, 38(11): 1-7 DOI:10.16606/j.cnki.issn0253-4320.2018.11.001
