综述了改良西门子法多晶硅制备工艺及尾气回收研究现状,从回收率、回收效果及能耗等方面阐述了湿法回收、膜分离回收和干法回收3种尾气回收工艺。重点概述了多晶硅尾气干法回收工艺各个单元的研究进展,并根据现状总结了未来的研究方向。

The research status of modified Siemens polysilicon production process as well as tail gas recovery is reviewed.Three kinds of tail gas recovery processes,including wet recovery,membrane separation recovery and dry recovery,are elaborated from the aspects of recovery rate,recovery effect and energy consumption.The research progress on each unit of polysilicon tail gas dry recovery process is summarized in detail,and the future research directions are predicted according to the current situation.

杜盼(1998-),女,硕士生;陆平(1980-),女,博士,副研究员,研究方向为化工分离与数值模拟,通讯联系人,pinglu@ipe.ac.cn。