为了有效检测电子级高纯盐酸中的痕量元素，利用电感耦合等离子体质谱法（ICP-MS）进行测定，用全基体进样系统（AMS）进样，用标准加入法进行上机检测，无需前处理，避免了在样品前处理时的污染问题。电感耦合等离子体质谱法可以消除多分子离子干扰，降低检出限，提高定量准确性。该方法的检出限为0.05~5.4 ng/L，加标回收率为96%~108%，稳定性RSD均不超过5%；操作简单，结果可靠，适用于高纯盐酸中痕量元素的快速测定。

Inductively coupled plasma mass spectrometry (ICP-MS) is used to effectively detect trace elements in electronic-grade high-purity hydrochloric acid.Total matrix injection system (AMS) is used for sampling, and the standard addition method is used for on-board detection, which does not need pre-treatment and avoids contamination problems during sample pre-treatment.ICP-MS can eliminate the interference of multi-molecular ions, reduce the detection limit and improve the quantitative accuracy.The detection limit is 0.05-5.4 ng·L^-1, the recoveries are in the range of 96%-108%, and the RSD of stability is less than 5%.This method is simple, can deliver reliable result and is suitable for the rapid determination of trace elements in high purity hydrochloric acid.

周豪(1999-),男,硕士生。