现代化工

现代化工 ›› 2023, Vol. 43 ›› Issue (7) : 30-34. DOI: 10.16606/j.cnki.issn0253-4320.2023.07.006

技术进展

四氯化硅冷氢化工艺及机理的研究进展

刘继三, 丁哲, 张豪豪, 陈锦溢, 华超, 陆平

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Research progress on process and mechanism for cold hydrogenation of silicon tetrachloride

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摘要

介绍了国内外冷氢化过程的研究现状,综述了对冷氢化过程工艺优化、热力学分析以及反应机理等领域的研究进展,分析了目前研究与工业应用之间的差距,并展望了未来的研究方向。

Abstract

Global research status of cold hydrogenation process for silicon tetrachloride is introduced.Research progress in process optimization,thermodynamic analysis and reaction mechanism of cold hydrogenation process is reviewed.The gap between research and industrial application at present is analyzed,and the future research direction is prospected.