采用射频磁控溅射法在透明聚酰亚胺（PI）衬底上制备了系列柔性透明导电薄膜，考察了氧化铟锡（ITO）沉积温度与热处理条件对其透光率和导电性的影响。结果表明，有氧气氛下高温溅射会对导电薄膜的颜色和透光率产生不利影响，而真空高温热处理可使薄膜保持无色和高透光率；导电薄膜的方块电阻和电阻率随沉积与热处理温度增大而明显降低；高温热处理使Sn⁴⁺含量显著增大，由此导致载流子浓度大幅提高和导电性显著改善。CF-5表现出良好光学透明性、导电性和可弯折性，可见光区透光率>88%，电阻率在9.4×10^-4 Ω·cm左右。

A series of flexible transparent conductive films are prepared on transparent polyimide substrate with high heat resistance by means of radio-frequency magnetron sputtering technique.The influences of indium tin oxide (ITO) deposition temperature and high-temperature treatment conditions on light transmittance and conductivity of the films are investigated in detail.The results show that high-temperature sputtering in an oxygen atmosphere can adversely affect the color and light transmittance of conductive films,while high-temperature treatment under vacuum condition can make the films keep colorless and high light transmittance.Both sheet resistance and resistivity of conductive films drop significantly with the increase of deposition temperature and heat treatment temperature.In particular,high-temperature treatment increases significantly Sn⁴⁺ content in conductive films,which brings about a substantial increase in carrier concentration and an effective improvement in conductivity.Among these flexible conductive films,CF-5 exhibits high optical transparency,good conductivity and excellent bendable performance.Its light transmittance in visible light region exceeds 88%,and its resistivity is as low as 9.4×10^-4Ω·cm.