通过在PDMS膜中加入NaCl微米颗粒形成孔结构，制得以多孔PDMS膜构建的柔性电容传感器，测试了不同NaCl质量分数下的灵敏度，同时对系统耐久性与响应速率进行了分析。结果表明，纯PDMS薄膜形成了较为光滑的表面，加入NaCl颗粒的薄膜形成了大量的孔隙结构。NaCl颗粒质量分数为20%的多孔传感器的灵敏度为0.68 kPa^-1，相对于无孔PDMS薄膜传感器得到显著改善。当压力增大时，灵敏度减小。对颗粒进行更长时间研磨后得到更小粒径，获得更高的薄膜传感器灵敏度。孔结构能够促进薄膜传感器对外界压力形成更明显的数值反馈。当对传感器施加5.0 Pa压力后，传感器实现了4 s以内的响应时间，可满足快速反应的要求。压力施加与去除的迟滞变化曲线基本重合，传感器只存在很低的迟滞。传感器弯曲前后灵敏度基本一致。

By adding NaCl micron particles into PDMS film to form pore structure,a flexible capacitance sensor constructed with porous PDMS film is prepared.The sensitivities of the sensors with different NaCl concentration are tested,and the durability and response rate of the system are analyzed.Results show that pure PDMS film forms a relatively smooth surface,and the PDMS film with NaCl particles forms a large number of pore structures.The sensitivity of the porous sensor with 20 wt% of NaCl is 0.68 kPa^-1,which has significantly been improved compared with pure PDMS film sensor.Sensitivity of the porous sensor decreases as pressure increases.After the particles have been grinded for a longer time,smaller size of particles can be obtained and the sensor with higher sensitive can be obtained.Pore structure can promote the sensor to form more obvious numerical feedback to external pressure.As 5.0 Pa pressure is applied to the sensor,it will response within 4 s,which can meet the requirements of rapid response.The hysteresis curves of pressure application coincides basically with that of pressure removal,and the sensor exists only very low hysteresis.The sensitivity of the sensor is basically stable and the sensitivities before and after bending are basically the same.