当前半导体行业的关键设备及关键部件基本由欧美日垄断，加上技术封锁造成的代差，未来很长一段时间我国半导体设备制造在软硬件上都无法实现质的跨越。通过综述国内外半导体清洗装备行业发展现状，以半导体清洗机的关键部件——嵌入式高压空气泵为例，从经济性评价指标、技术可行性和知识产权风险、博弈四个维度分析当前难于国产化之困局，寻求破局之策。

Presently,almost the production of all critical equipment and key components in global semiconductor industry is monopolized by European,American and Japanese manufacturers.Worsening by the generation gap caused by technical blockade,China's local enterprises will not make significant progress both on semi-conductor hardware and software areas in the near future.This paper presents a review on global and China's current situation of critical components for semiconductor cleaning facilities.By taking the embedded high pressure air-pump,which is a critical component for semi-conductor cleaning machine,as an example,this paper analyzes deeply on the difficulties in localization from four aspects such as economical evaluation indexes,technological feasibility,IPs risks and gambling.Furthermore,it is studying on proper solutions for the difficulties.

马磊(1981-),男,博士在读,从事半导体产业研究,13812955387,malei@aumoproducts.com