以TiCl₃（3THF）为原料合成脒基钛（Ⅲ）配合物1，将其作为前驱体通过LPCVD沉积N/C-TiO₂薄膜。利用¹HNMR、元素分析以及热重分析（TGA）探究配合物1的结构和热化学性质。结果表明，配合物1具有良好的热稳定性和合适的挥发性，满足CVD的要求。通过EDS和UV-Vis吸收光谱表征了薄膜的成分及光学性能，结果表明，当沉积温度为350℃时，N/C-TiO₂薄膜的N、C质量分数最高，其禁带宽度降低为2.82 eV，对可见光的吸收最强。与纯的二氧化钛薄膜相比，N/C-TiO₂薄膜对亚甲基蓝的降解率显著提高到90%。

A titanium (Ⅲ) amidinate (1) compound is synthesized from TiCl₃(3THF) and is then used as a precursor to deposit on quartzes in a LPCVD reactor system to make N/C-TiO₂ films.Compound (1) is characterized by ¹HNMR spectrum,elemental analysis and thermogravimetric analysis (TGA) to evaluate its structure and thermal properties.TGA curves imply compound (1) possesses suitable thermal stability and volatility and can meet the demands of CVD.The components and optical properties of N/C-TiO₂ films are investigated by EDS and UV-Vis absorption spectrums,respectively.The results demonstrate that when deposition happens at 350℃,N/C-TiO₂ film has the highest contents of N and C and exhibits a stronger ability to absorb visible light,and its energy band gap decreases to 2.82 eV.The degradation rate of methylene blue by N/C-TiO₂ film improves significantly to 90%.

程兰云(1993-),女,硕士研究生,研究方向为精细化学品合成与应用,LanyunCheng@163.com