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摘要
从碳纳米管作为互连材料的优势、互连的形式、互连的制备方法、碳纳米管互连接触电阻的改善以及碳纳米管互连技术面临的挑战5方面进行了概述，重点介绍了制备碳纳米管互连线的2种方式，为碳纳米管互连技术的应用提供帮助。
Abstract
This paper summarizes the advantages of carbon nanotubes as interconnection materials,the form of interconnection,the preparation method of interconnection,the improvement of contact resistance of carbon nanotubes interconnection and the challenges faced by carbon nanotubes interconnection technology.Two preparation methods for carbon nanotube interconnect lines are introduced,which aims to supply assistance in the application of carbon nanotube interconnection technology.
关键词
碳纳米管
/
制备
/
互连线
/
性能
Key words
carbon nanotube
/
fabrication
/
interconnect lines
/
performance
Author summay
碳纳米管互连技术的研究进展[J].
, 2018, 38(12): 19-23,25 DOI:10.16606/j.cnki.issn0253-4320.2018.12.005
