现代化工

现代化工 ›› 2018, Vol. 38 ›› Issue (5) : 38-42. DOI: 10.16606/j.cnki.issn0253-4320.2018.05.009

技术进展

改良西门子法制备多晶硅还原过程研究进展

李亚广, 聂陟枫, 周扬民, 方文宝, 谢刚, 侯彦青

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Research progress in reduction process of polysilicon production by modified Siemens method

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摘要

对生产多晶硅的主要生产方法进行了比较，指出改良西门子法、流化床法、冶金法这3种工艺的优点和不足。重点介绍了多晶硅主流生产方法改良西门子法，阐述了改良西门子法生产多晶硅还原过程的反应机理、数值模拟等，并对该工艺目前的研究进展进行了阐述。

Abstract

The main polysilicon production methods are compared each other.The advantages and disadvantages of the modified Siemens method,the fluidized bed method and the metallurgical method are pointed out.The research progress and existing problems for the process of the modified Siemens method that is the mainstream polysilicon production method at present are introduced emphatically,mainly from the aspects of reaction mechanism,numerical simulation and process flow,etc.