利用MEMS加工技术设计并制作了微型气相色谱柱。针对被分离恶臭物质的特性，选取CB-40（40%苯基+60%二甲基聚硅氧烷）固定相对色谱柱进行涂覆，制作了毛细管式微型色谱柱，并作为第一维分离柱；选用与Silica Bond Plot相同的固定相作为填充物固定相，制作了微型填充式色谱柱，作为第二维分离柱。选取典型的硫化氢、甲硫醇、二硫化碳、甲硫醚、苯、甲苯、乙苯、对二甲苯、苯乙烯等8种恶臭物质进行分离检测。设计了一整套的进样采集模块与控制加热模块，并选用自制的管式富集器与灵敏度高、体积小的光离子化检测器，大大提高了检测精度。苯的检测限可以达到0.174 μg/mL，硫化氢的检测限可以到达0.133 μg/mL。

Micro gas chromatography column is designed and fabricated by using MENS processing technology.CB-40 (40% phenyl polysiloxane+60% dimethyl polysiloxane) fixed phase is selected to coat the chromatography column according to characteristics of the odor gases to be separated,gaining a capillary column microcolumn as the first-dimension column.The micro packed chromatography column is fabricated by using the same stationary phase as the Bond Plot Silica and is used as the second-dimension separation column.Typical mixed malodorous gases including hydrogen sulfide,methyl mercaptan,carbon disulfide,dimethyl sulfide,benzene,toluene,ethylbenzene,xylene and styrene are selected to perform separation detection.A whole set of sampling acquisition module and control heating module is designed and manufactured,and the self-made tubular concentrator and the photoionization detector with high sensitivity and small size are employed,which helps to improve the detection accuracy greatly.By this method,the detection limit of benzene can reach 0.174 μg·mL^-1 and the detection limit of hydrogen sulfide can reach 0.133 μg·mL^-1.

周琪(1991-),男,博士生,主要从事测控仪器与机电参数测试测量研究,13820758091@163.com