为了将氧化锌（ZnO）纳米线有效集成到微纳器件上，采用介电电泳法对一维材料ZnO纳米线进行组装。研究了介电电泳（DEP）组装过程中外加交变电压幅值、ZnO纳米线悬浮液质量浓度和外加电场作用时间等组装参数对组装结果的影响，结果表明，组装到电极间ZnO纳米线的数量随着上述参数值的增大而增加。同时，对组装后的ZnO纳米线进行了电学性质测量以及组装形态和接触电阻分析，组装后ZnO纳米线的I-V特性曲线近似呈线性，且在紫外光照射下，ZnO样件显示出良好的响应特性。

In order to integrate effectively ZnO nanowires onto micro/nano-devices,ZnO nanowires,a kind of one-dimensional nano-materials,is assembled via dielectrophoresis (DEP) method.The effects of the DEP assembly parameters such as the amplitude of applied alternating voltage,the mass concentration of ZnO nanowire suspension and the effecting duration of applied electric field on the assembly outcome are studied.The results show that the number of ZnO nanowires assembled between the electrodes increases with the increase of the values of above-mentioned parameters.The electrochemical properties,assembling morphology and contact resistance of assembled ZnO nanowires are detected and analyzed as well.The I-V characteristic curves of the assembled ZnO nanowires exhibit approximate linearity,and the nanowire samples show good response properties under UV irradiation.

张玉婷(1990-),女,硕士研究生,主要从事碳纳米功能材料组装研究,zhangyuting5682@163.com。