Research advances on tail gas recovery process for polysilicon units

DU Pan, CHEN Jin-yi, DING Zhe, LU Ping, HUA Chao, BAI Fang, WANG Fan

Modern Chemical Industry ›› 2024, Vol. 44 ›› Issue (4) : 70-74.

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Modern Chemical Industry ›› 2024, Vol. 44 ›› Issue (4) : 70-74. DOI: 10.16606/j.cnki.issn0253-4320.2024.04.014
Progress in Technology

Research advances on tail gas recovery process for polysilicon units

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 44(4): 70-74 https://doi.org/10.16606/j.cnki.issn0253-4320.2024.04.014

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