Application progress of distillation technology in preparation of electronic grade chemicals

doi:10.16606/j.cnki.issn0253-4320.2022.12.003

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Modern Chemical Industry ›› 2022, Vol. 42 ›› Issue (12) : 13-18. DOI: 10.16606/j.cnki.issn0253-4320.2022.12.003

Progress in Technology

Application progress of distillation technology in preparation of electronic grade chemicals

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 42(12): 13-18 https://doi.org/10.16606/j.cnki.issn0253-4320.2022.12.003

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Received	Revised	Published
2021-11-01	2022-10-14	2022-12-20
Issue Date
2022-12-23

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