Pilot study on metal sintered filter element for purifying chlorosilane in polysilicon production

doi:10.16606/j.cnki.issn0253-4320.2021.07.047

LIU Jian-hua, WAN Ye, ZHAO Xiong, ZHAO Yu, ZHOU Yong-yi, YAN Da-zhou

Modern Chemical Industry ›› 2021, Vol. 41 ›› Issue (7) : 231-233.

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Modern Chemical Industry ›› 2021, Vol. 41 ›› Issue (7) : 231-233. DOI: 10.16606/j.cnki.issn0253-4320.2021.07.047

Industrial Technology

Pilot study on metal sintered filter element for purifying chlorosilane in polysilicon production

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 41(7): 231-233 https://doi.org/10.16606/j.cnki.issn0253-4320.2021.07.047

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Received	Revised	Published
2020-09-24	2021-05-20	2021-07-20
Issue Date
2021-07-14

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