Deep dehydration of electronic grade HCl gas by aluminosilicate molecular sieves

doi:10.16606/j.cnki.issn0253-4320.2021.01.021

YE Xiang-rong, ZHANG Guang-di, YE Su-fang, XIA Tian, ZHOU Jing-sen, ZHANG Yun-feng, LIAO Jin, LIU Jun-ming

Modern Chemical Industry ›› 2021, Vol. 41 ›› Issue (1) : 103-107,112.

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Modern Chemical Industry ›› 2021, Vol. 41 ›› Issue (1) : 103-107,112. DOI: 10.16606/j.cnki.issn0253-4320.2021.01.021

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Deep dehydration of electronic grade HCl gas by aluminosilicate molecular sieves

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 41(1): 103-107,112 https://doi.org/10.16606/j.cnki.issn0253-4320.2021.01.021

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Received	Revised	Published
2020-03-13	2020-11-22	2021-01-20
Issue Date
2021-01-14

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