Kinetics for disproportionation reaction of trichlorosilane and preparation of silane by reactive distillation

HUANG You-guang, SONG Chao, ZHANG Qing-cheng

Modern Chemical Industry ›› 2018, Vol. 38 ›› Issue (11) : 196-199.

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Modern Chemical Industry ›› 2018, Vol. 38 ›› Issue (11) : 196-199. DOI: 10.16606/j.cnki.issn0253-4320.2018.11.043

Kinetics for disproportionation reaction of trichlorosilane and preparation of silane by reactive distillation

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 38(11): 196-199 https://doi.org/10.16606/j.cnki.issn0253-4320.2018.11.043

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