
Kinetics for disproportionation reaction of trichlorosilane and preparation of silane by reactive distillation
HUANG You-guang, SONG Chao, ZHANG Qing-cheng
Modern Chemical Industry ›› 2018, Vol. 38 ›› Issue (11) : 196-199.
Kinetics for disproportionation reaction of trichlorosilane and preparation of silane by reactive distillation
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