China's development status of chemicals for integrated circuit

doi:10.16606/j.cnki.issn0253-4320.2018.11.001

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Modern Chemical Industry ›› 2018, Vol. 38 ›› Issue (11) : 1-7. DOI: 10.16606/j.cnki.issn0253-4320.2018.11.001

China's development status of chemicals for integrated circuit

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 38(11): 1-7 https://doi.org/10.16606/j.cnki.issn0253-4320.2018.11.001

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Received	Revised	Published
2018-08-14	2018-09-18	2018-11-20
Issue Date
2018-11-14

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