Study on reduction process in polysilicon production using modified Siemens process

doi:10.16606/j.cnki.issn0253-4320.2017.12.042

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Modern Chemical Industry ›› 2017, Vol. 37 ›› Issue (12) : 175-177. DOI: 10.16606/j.cnki.issn0253-4320.2017.12.042

Study on reduction process in polysilicon production using modified Siemens process

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 37(12): 175-177 https://doi.org/10.16606/j.cnki.issn0253-4320.2017.12.042

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Received	Published
2017-05-17	2017-12-20
Issue Date
2018-02-26

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