Abstract: The production process of the reduction furnace in polysilicon production is renovated through increasing the operating pressure from 0.05~0.1 MPa to 0.5 MPa,and controlling appropriate temperature,feed rate of materials and proportion among materials.In an experimental furnace batch with the optimal comprehensive performance,the production period shortens from 200 hours to 100 hours,the power consumption per kilogram polysilicon reduces from 150 kWh to 73.8 kWh,and the apparent quality and purity of polysilicon are also significantly improved.
贾曦, 方旭升, 罗旭峰, 浦晓东. 改良西门子法生产多晶硅的还原工艺研究[J]. 现代化工, 2017, 37(12): 175-177.
JIA Xi, FANG Xu-sheng, LUO Xu-feng, PU Xiao-dong. Study on reduction process in polysilicon production using modified Siemens process. Modern Chemical Industry, 2017, 37(12): 175-177.
[1] 李国栋,张秀玲,胡仰栋.电子级多晶硅生产工艺的热力学分析[J].过程工程学报,2007,7(3):521-523. [2] 李国栋.基于Gibbs自由能最小法的反应过程优化设计的研究[D].青岛:中国海洋大学,2007. [3] 苗军舰,丘克强,顾珩,等.西门子体系中SiHCl3和SiCl4的热力学行为[J].中国有色金属学报,2008,18(10):1938. [4] 杨涛.改良西门子法生产多晶硅工艺设计探讨[J].贵州化工,2009,34(3):7-9. [5] William C O'Mara.Handbook of semiconductor silicon technology[M].New Jersey USA:Noyes Publications,1990:5-6. [6] Michael A,Rodgers.Process for manufacturing pure polycrystalline silicon:US,899125[P].1978-04-24. [7] Uda Hashim,Abang A Ehsan,Ibrahim Ahmad.High purity polycrystalline silicon growth and characterization[J].Chiang Mai Journal of Science,2007,34(1):48-49. [8] 丁国江.三氯氢硅和四氯化硅混合比对多晶硅生产的影响[J].四川有色金属,1998,(3):14-19. [9] 侯彦青,聂陟枫,谢刚,等.SiHCl3-H2体系多晶硅化学气相沉积的传递-动力学模型[J].中南大学学报,2016,47(11):3628-3633.